Air bearing stage

Feature

Nano accuracy positioning stage developed for semiconductor/FPD industries and features air bearing of new generation. It is leading by using vacuum preloaded air bearing with low consumption, dynamic counter balancing technology and mass compensation algorithm, which enable accurate motion in a thousandth second, decreasing production takt time. Futher-more, friction is eliminated so that equipment reliability is increased.

HIWIN Technical Support

Select HIWIN near you

Taiwan, China

Tel:+886-4-2359-4510

Ext 1202, 1235

Suzhou, Mainland China

Tel:+86-512-80685599

Ext 7511, 7460

Fax: +86-512-80689858

Japan Korea

Tel:+886-4-2359-4510

Ext 1278, 1255

Other

Tel:+886-4-2359-4510

Ext 8412

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