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TEL: +86-512-80685599

 Page Copyright© HIWIN TECHNOLOGIES(CHINA) CORP.  Copyright 2018 All Rights Reserved.    Powered by www.300.cn  苏ICP备18061715号  

 

 

 

 

 

 

HIWIN Technology China

 

 

 

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+86-512-80685599

 Page Copyright© HIWIN TECHNOLOGIES(CHINA) CORP.  Copyright 2018 All Rights Reserved.    Powered by www.300.cn  苏ICP备18061715号  

 

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Wafer Aligner

features●HPAseriesisathree-axiscontrolledwaferedgefinder.ThewholeseriesadoptsHIWINmicrosingleaxisrobotmoduletorealizetheadvantagesofhighspeed,highprecision,highrigidity,highefficiencyandsmallvolume.●allinonedesign,withoutadditionalcontrollerandwiringspace,theproductvolumeisthesmallestintheindustryundertheconditionofequalspecifications.●equippedwithintelligentlighttransparentlasersensor,itcansupportthecontourdetectionfunctionoftransparent,translucentandopaqueobjects,andisapplicabletothewaferandglasswithadiameterof100mm~300mm.●thecleanlinessgradeoftheproductisISOclass3(Class1),andtheapplicationrangeincludessemiconductor,optoelectronicsandotherindustries.applicationItisapplicabletothecalibrationandalignmentofsemiconductorindustry(wafer),LEDindustry(sapphiresubstrate),photoelectricindustry(glass),etc.
Key words

RS406-600-20P-LU

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RS406-600-40P-LU

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RS406-600-200-LU

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RS406-600-400-LU

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RT605-909-GB Articulated Robot

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RT605-710-GB Articulated Robot

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RS405-LU Standard

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RS405-LU Protection

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