Nano Positioning Stage

Feature

Nano-positioning stage has a highly stable structure, nano-level servo control ability and software solutions to improve equipment accuracy. It shows a perfect integration of mechanics, electricity and software. It provides competitive solutions, especially for semiconductor industry.

● Nano-level positioning: This is applied in high-end precision inspection equipment. It follows the trend of industrial applications, which keep upgrading.

● Robust and stable motion control ability: It has path planning function with auto-tuning. This allows the platform to achieve outstanding dynamic performance.

● Smart manufacturing: It can easily achieve stable manufacturing through smart modules and reduce unexpected downtime loss of the production line.

● Integration of key technologies: Through the software and hardware integration, it can reduce the cost of upgrading user equipment.

Nano positioning stability

±2 nm

High velocity stability @100 mm/s

±0.1%

HIWIN Technical Support

Select HIWIN near you

Taiwan, China

Tel:+886-4-2359-4510

Ext 1202, 1235

Suzhou, Mainland China

Tel:+86-512-80685599

Ext 7511, 7460

Fax: +86-512-80689858

Japan Korea

Tel:+886-4-2359-4510

Ext 1278, 1255

Other

Tel:+886-4-2359-4510

Ext 8412

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