Load Port

Feature

Applicable for Various Specifications

HIWIN Load Port HLP series can be used for loading and unloading 8-inch and 12-inch multiple substrates and capable of docking with FOUP/FOSB. HIWIN also offers optional adaptors for 8-inch open cassette and 12-inch metal carrier.

Self-made Key Component

HIWIN Load Port HLP series is equipped with self-made key components including Ballscrew, Linear Guideway, and Single Axis Robot. The EFEM also integrates with HIWIN self-develop software. This makes HIWIN able to provide vertical integration and flexible solution to customers.

Shared Specification

8" + 12"

Certification

SEMI-S2

Cleanliness class

Class 1

APPLICATION

photolithography etching CVD PVD

HIWIN Technical Support

Full Specs

Select HIWIN near you

Taiwan, China

Tel:+886-4-2359-4510

Ext 1202, 1235

Suzhou, Mainland China

Tel:+86-512-80685599

Ext 7511, 7460

Fax: +86-512-80689858

Japan Korea

Tel:+886-4-2359-4510

Ext 1278, 1255

Other

Tel:+886-4-2359-4510

Ext 8412

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